- Contact Person : Mr. Xu Kui
- Company Name : Beijing Perfect Electronic Science Technology Co., Ltd.
- Tel : 86-10-87581883
- Fax : 86-10-87581933
- Address : Beijing,Beijing,second district of fengzhuyuan,building 4,unit 1,room1010,fengtai district,beijing,china
- Country/Region : China
- Zip : 100068
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5KW MF magnetron sputtering power supply
1. Main technical parameters:
Type | Input Power | Maximum Current | Volume(mm) | Cooling Method |
WZP2 | 2KW | 2.5A | 400*95*370 | Wind |
WZP5 | 5KW | 6A | 480*135*380 | Wind |
WZP10 | 10KW | 12A | 480*135*380 | Wind |
WZP20 | 20KW | 26A | 480*135*380 | Water |
WZP40 | 40KW | 50A | 480*263*550 | Water |
WZP60 | 60KW | 75A | 600*230*600 | Water |
WZP80 | 80KW | 100A | 600*230*600 | Water |
WZP100 | 100KW | 125A | 600*460*600 | Water |
(1) Input voltage: AC 3 phase 4 wire, 380V±10%
(2) OutputVoltage: operating voltage 200~800V,open-circuit voltage>1KV
(3) Work frequency:40KHZ
(4) Output waveform: Quasi-sinewave
(5) Stabilized voltage, stabilized current and stabilized power could be swtiched.
(6) TTL control: High level (5±2V),low level (0~2V)
(7) Environment:temperature(0~35)ºC,water temperature(25ºC) humidity≤85%
(8) External control:DB9, 9 pin interface(stimulation or digital interface optional)
(9) Maximum input current:output current+20%
(10) Maximum input power: output power +10%
Image:
WZP2
WZP40
5KW,10kw MF magnetron sputtering power supply wzp5